3D nonlinear photolithography of Tin oxide ceramics via femtosecond laser

As a wide band gap semiconductor material, tin oxide (SnO2) has been widely used in gas sensing, optoelectronics and catalysis. The complex micro nanoscale three-dimensional (3D) geometric structures endow the conventional SnO2 ceramics with novel properties functionalities. Nevertheless, cannot be cast or machined easily due to their high mechanical toughness resistance. additive manufacturing opens great opportunity for flexibly geometrical shaping, while arbitrary shaping of at is always challenge. Herein, preceramic monomers which can polymerized under ultrafast laser irradiation, were utilized form 3D polymer structures. After calcination treatment, these green-body could converted into pure high-dense uniform shrinkage, feature size was down submicron. Transmission electron microscopy (TEM) analysis displays that printed ceramic nanostructures nanocrystallized grain sizes 2.5 ± 0.4 nm. This work provides possibility arbitrarily sub-100 nm resolution, thus making it promising applications different fields.